The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 07, 2004
Filed:
Dec. 26, 2001
Applicant:
Inventors:
Karl-Heinz Schuster, Königsbronn, DE;
Alexander Epple, Aalen, DE;
Assignee:
Carl Zeiss Semiconductor Manufacturing Technologies AG, Oberkochen, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 2/754 ; G03B 2/742 ; G03B 2/752 ; G02B 9/62 ; G02B 9/60 ;
U.S. Cl.
CPC ...
G03B 2/754 ; G03B 2/742 ; G03B 2/752 ; G02B 9/62 ; G02B 9/60 ;
Abstract
A projection objective includes a first lens group (G ) of positive refractive power, a second lens group (G ) of negative refractive power and at least one further lens group of positive refractive power in which a diaphragm is mounted. The first lens group (G ) includes exclusively lenses of positive refractive power. The number of lenses of positive refractive power (L to L ; L , L ) of the first lens group (G ) is less than the number of lenses of positive refractive power (L to L ; L to L ) which are mounted forward of the diaphragm of the further lens group (G ).