The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2015
Filed:
Jan. 25, 2012
Applicants:
Daniel Runde, Satteldorf, DE;
Florian Doll, Puchheim, DE;
Reinhard Voelkel, Neuchatel, CH;
Kenneth Weible, Neuchatel, CH;
Gundula Weiss, Aalen, DE;
Michael Gerhard, Aalen, DE;
Inventors:
Daniel Runde, Satteldorf, DE;
Florian Doll, Puchheim, DE;
Reinhard Voelkel, Neuchatel, CH;
Kenneth Weible, Neuchatel, CH;
Gundula Weiss, Aalen, DE;
Michael Gerhard, Aalen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70191 (2013.01); G03F 7/70108 (2013.01); G03F 7/70158 (2013.01);
Abstract
An optical beam deflecting element may be used effectively as an energy distribution manipulator in an illumination system to vary the energy distribution within a given spatial intensity distribution in a pupil plane of the illumination system substantially without changing the shape and size and position of illuminated areas in the pupil plane.