The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 2023
Filed:
Sep. 27, 2019
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Oliver Beyer, Heidenheim, DE;
Michael Gerhard, Aalen, DE;
CARL ZEISS SMT GMBH, Oberkochen, DE;
Abstract
A method for detecting deposited particles (P) on a surface () of an object () includes: irradiating a partial region of the surface () of the object () with measurement radiation; detecting measurement radiation scattered on the irradiated partial region, and detecting particles in the partial region of the surface of the object () based on the detected measurement radiation. In the steps of irradiating and detecting, the surface () of the object () has an anti-reflective coating () and/or a surface structure () for reducing the reflectivity of the surface () for the measurement radiation (), wherein the particle detection limit is lowered due to the anti-reflective coating () and/or the surface structure (). Also disclosed are a wafer () and a mask blank for carrying out the method.