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For the Inventor, By the Inventor

San Diego, CA, United States of America

Cymer, Inc.


USPTO Granted Patents = 541

% Expired Patents = 15.9


Trademarks = 9

Forward Citations = 9,517

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349 inventors (with patents filed for the assignee):

goldMedal William N Partlo (144 out of 165 patents)

silverMedal Igor Vladimirovich Fomenkov (123 out of 164 patents)

bronzeMedal Alexander Igorevich Ershov (117 out of 152 patents)

4.  Richard L Sandstrom (102 out of 124 patents)

5.  Palash P Das (58 out of 68 patents)

6.  Richard M Ness (46 out of 46 patents)

7.  Richard G Morton (41 out of 48 patents)

8.  Richard C Ujazdowski (41 out of 41 patents)

9.  Daniel J W Brown (39 out of 47 patents)

10.  Thomas Patrick Duffey (34 out of 34 patents)

11.  Alexander Bykanov (31 out of 45 patents)

12.  Robert N Jacques (30 out of 38 patents)

13.  Joshua Jon Thornes (26 out of 26 patents)

14.  Tom A Watson (26 out of 28 patents)

15.  Thomas Hofmann (25 out of 25 patents)


Core Competencies:
Laser Beam Generation
Gas Management
Optical Alignment
Spectral Control
DUV Lithography
Electrode Lifespan
Dust Trapping
Light Source Calibration
Wavelength Stabilization
Metrology
Pulsed Light Control
Fretting Corrosion

541 patents:

1. 12736886 - Prediction apparatus and method for optical source (2026-09-15),
2. 12693600 - Control voltage threshold selection to facilitate multifocal imaging (2026-07-28),
3. 12676447 - Apparatus for and method of optical component alignment (2026-07-07),
4. 12663726 - Optimization of lithographic process based on bandwidth and speckle (2026-06-23),
5. 12597754 - Predictive control of a pulsed light beam (2026-04-07),
6. 12597753 - Packed-bed filter for metal fluoride dust trapping in laser discharge chambers (2026-04-07),
7. 12586978 - Apparatus for and method of generating multiple laser beams (2026-03-24),
8. 12540850 - Predictive calibration scheduling apparatus and method (2026-02-03),
9. 12529962 - Method of compensating wavelength error induced by repetition rate deviation (2026-01-20),
10. 12489266 - Prolonged life laser chamber electrode and laser having same (2025-12-02),
11. 12476432 - Directed gas purge to reduce dusting of excimer discharge chamber windows (2025-11-18),
12. 12438334 - Apparatus for and method of modulating a light source wavelength (2025-10-07),
13. 12401169 - Laser light energy and dose control using repetition rate based gain estimators (2025-08-26),
14. 12401167 - Gas control method and related uses (2025-08-26),
15. 12374853 - Control system for a plurality of deep ultraviolet optical oscillators (2025-07-29),
Cymer, Inc. is a leading supplier of photolithography light sources used in the semiconductor industry. The company's laser-produced plasma (LPP) extreme ultraviolet (EUV) light sources enable the production of advanced semiconductor devices with smaller transistor features. Cymer's innovative technology is essential for the mass production of next-generation semiconductors used in various electronic devices.
This text is generated by artificial intelligence and may not be accurate.

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USPTO Data Jan 1 1976 - Sep 15 2026

Cymer, Inc.
541 Patents

#11 in San Diego, CA

#199 in California

#902 in US

#1,790 in the World

San Diego, CA (US)
San Diego, CA, United States of America

Cymer, Inc.

Forward Citations = 9,517

349 inventors:

goldMedal William N Partlo (144 out of 165 patents)

silverMedal Igor Vladimirovich Fomenkov (123 out of 164 patents)

bronzeMedal Alexander Igorevich Ershov (117 out of 152 patents)

4.  Richard L Sandstrom (102 out of 124 patents)

5.  Palash P Das (58 out of 68 patents)

Please report any incorrect information to [email protected]
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