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For the Inventor, By the Inventor

San Diego, CA, United States of America

Cymer, Inc.


USPTO Granted Patents = 532


Trademarks = 11

Forward Citations = 9,406

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345 inventors (with patents filed for the assignee):

goldMedal William N Partlo (144 out of 165 patents)

silverMedal Igor Vladimirovich Fomenkov (123 out of 164 patents)

bronzeMedal Alexander Igorevich Ershov (117 out of 152 patents)

4.  Richard L Sandstrom (102 out of 124 patents)

5.  Palash P Das (58 out of 68 patents)

6.  Richard M Ness (46 out of 46 patents)

7.  Richard G Morton (41 out of 48 patents)

8.  Richard C Ujazdowski (41 out of 41 patents)

9.  Daniel J W Brown (39 out of 47 patents)

10.  Thomas Patrick Duffey (33 out of 33 patents)

11.  Alexander Bykanov (31 out of 45 patents)

12.  Robert N Jacques (30 out of 38 patents)

13.  Tom A Watson (26 out of 28 patents)

14.  Thomas Hofmann (25 out of 25 patents)

15.  Joshua Jon Thornes (24 out of 24 patents)


Core Competencies:
Laser Chamber Electrode
Excimer Discharge Chamber
Light Source Wavelength Modulation
Deep Ultraviolet Optical Oscillators
Semiconductor Photolithography
Laser Beam Alignment
Gas Management System
Spectral Feature Control
Radiation Source Testing
Pulse Timing Control
Dust Trapping Systems
Electrode Lifespan Extension

532 patents:

1. 12489266 - Prolonged life laser chamber electrode and laser having same (2025-12-02),
2. 12476432 - Directed gas purge to reduce dusting of excimer discharge chamber windows (2025-11-18),
3. 12438334 - Apparatus for and method of modulating a light source wavelength (2025-10-07),
4. 12401169 - Laser light energy and dose control using repetition rate based gain estimators (2025-08-26),
5. 12401167 - Gas control method and related uses (2025-08-26),
6. 12374853 - Control system for a plurality of deep ultraviolet optical oscillators (2025-07-29),
7. 12360466 - Maintenance of modules for light sources used in semiconductor photolithography (2025-07-15),
8. 12341314 - Conduit system, radiation source, lithographic apparatus, and methods thereof (2025-06-24),
9. 12332569 - Metrology for improving DUV laser alignment (2025-06-17),
10. 12316063 - Output light beam formation apparatus (2025-05-27),
11. 12298670 - Apparatus for and methods of combining multiple laser beams (2025-05-13),
12. 12253806 - Gas purge systems for a laser source (2025-03-18),
13. 12245409 - Electromagnetic shield for a sealing mechanism of a laser chamber (2025-03-04),
14. 12244116 - Apparatus for and method of optical component alignment (2025-03-04),
15. 12216411 - Predictive apparatus in a gas discharge light source (2025-02-04),
Cymer, Inc. is a leading supplier of photolithography light sources used in the semiconductor industry. The company's laser-produced plasma (LPP) extreme ultraviolet (EUV) light sources enable the production of advanced semiconductor devices with smaller transistor features. Cymer's innovative technology is essential for the mass production of next-generation semiconductors used in various electronic devices.
This text is generated by artificial intelligence and may not be accurate.

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USPTO Data Jan 1 1976 - Dec 30 2025

...
532 Patents

#11 in San Diego, CA

#207 in California

#889 in US

#1,778 in the World

...
San Diego, CA, United States of America

Cymer, Inc.

Forward Citations = 9,406

345 inventors:

goldMedal William N Partlo (144 out of 165 patents)

silverMedal Igor Vladimirovich Fomenkov (123 out of 164 patents)

bronzeMedal Alexander Igorevich Ershov (117 out of 152 patents)

4.  Richard L Sandstrom (102 out of 124 patents)

5.  Palash P Das (58 out of 68 patents)

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