The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2026
Filed:
Nov. 14, 2022
Applicant:
Cymer, Llc, San Diego, CA (US);
Inventors:
MD Hossain Toufiq Imam, San Diego, CA (US);
Rabin Paudel, Portland, OR (US);
Gamaralalage G. Padmabandu, San Diego, CA (US);
Assignee:
Cymer, LLC, San Diego, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); H01S 3/00 (2006.01); H01S 3/10 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70041 (2013.01); G03F 7/70575 (2013.01); H01S 3/0057 (2013.01); G03F 7/0037 (2013.01); H01S 3/10046 (2013.01);
Abstract
Disclosed is an apparatus and method for use in a system in which light pulses of different wavelengths are generated by moving an optical element connected to an actuator and in which the actuator is driven by a command voltage having a threshold cap depending on a position of a pulse in a burst of pulses.