The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2025
Filed:
May. 11, 2020
Cymer, Llc, San Diego, CA (US);
Kuo-Tai Teng, Poway, CA (US);
Rahul Ahlawat, San Diego, CA (US);
Piraj Fozoonmayeh, San Diego, CA (US);
Cymer, LLC, San Diego, CA (US);
Abstract
Apparatus for and method of controlling a laser system capable of generating bursts of pulses of laser radiation having multiple alternate wavelengths in which an element controlling the wavelength is pre-positioned between bursts to be between its position for generating one wavelength and its position for generating another wavelength. Also disclosed is a system that determines an optimal control waveform for the element to move between positions using quadratic programming, dynamic programing, inversion feed forward control, or iterative learning control. A data storage device such as a pre-populated lookup table or a field programmable gate array may be used to store at least one optimal control parameter for each of a plurality of repetition rates.