Kuo-Tai Teng

Title: Innovations of Kuo-Tai Teng: Pioneering Optical Measurement Systems

Introduction

Kuo-Tai Teng, an accomplished inventor based in Poway, California, is recognized for his significant contributions to the field of optical measurement systems. With three patents to his name, Teng has developed innovative methods that enhance the precision of calibration and measurement in sophisticated optical technologies. His work is instrumental in advancing the capabilities of modern radiation systems.

Latest Patents

Among his latest patents, the first one focuses on the "Determination of measurement error in an etalon." This invention involves accessing information related to an etalon, which is designed to generate an interference pattern from a received light beam. By analyzing spatial information from multiple fringes, Teng's method enables the determination of wavelength values and allows for the calculation of measurement errors, ensuring more accurate calibrations in optical devices.

The second notable patent, titled "Method of compensating wavelength error induced by repetition rate deviation," outlines a radiation system designed to improve the accuracy of pulse controls in lithographic applications. This system utilizes an optical element that interacts with radiation pulses, coupled with a processor that adjusts the system’s control signals based on pulse information. This innovation enhances the performance of lithographic apparatuses operating in a multi-focal imaging mode.

Career Highlights

Currently associated with Cymer, Inc., Kuo-Tai Teng has made substantial contributions to the development of cutting-edge technologies in optical systems and measurement techniques. His innovative patents reflect his commitment to advancing the field, laying the groundwork for more efficient and precise technological applications.

Collaborations

Throughout his career, Teng has collaborated with notable professionals, including colleagues Rahul Ahlawat and Russell Allen Burdt. These partnerships foster a collaborative environment that encourages the exchange of ideas, driving innovations that address complex challenges in the industry.

Conclusion

Kuo-Tai Teng's work serves as an inspiration in the field of optical measurements and radiation systems. His inventive solutions not only enhance the functionality of existing technologies but also pave the way for future advancements. As he continues to contribute to Cymer, Inc., his legacy of innovation will undoubtedly impact the industry for years to come.