The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2026
Filed:
Dec. 10, 2020
Cymer, Llc, San Diego, CA (US);
Ulrich Niemann, San Diego, CA (US);
Walter Dale Gillespie, Poway, CA (US);
Cymer, LLC, San Diego, CA (US);
Abstract
A light source apparatus () includes a gas discharge stage () and a metal fluoride trap (). The gas discharge stage includes an optical amplifier () and a set of optical elements (). The optical amplifier includes a chamber () configured to hold a gas discharge medium (), the gas discharge medium outputting a light beam. The set of optical elements is configured to form an optical resonator around the optical amplifier. The metal fluoride trap is configured to trap metal fluoride dust generated from the gas discharge stage. The metal fluoride trap includes an electrostatic precipitator () and a packed-bed filter () disposed around the electrostatic precipitator. The packed-bed filter includes a plurality of beads configured () to absorb metal fluoride dust ().