Alexander Bykanov

This inventor holds 45 USPTO granted patents and 4 EPO patents, primarily in EUV Light Sources. Top assignees: Cymer, Inc., Kla Tencor Corporation, Kla Corporation. Active years: 2006-2024.

USPTO Granted Patents = 45

% Patents Active = 64.4

EPO Patents = 4 (Patent Applications = 5)

Average Co-Inventor Count = 3.2

ph-index = 16

Forward Citations = 731(Granted Patents)

Location History:

Belmont, MA (US) (2006)
Escondido, CA (US) (2019 - 2021)
San Diego, CA (US) (2006 - 2022)

Company Filing History:

Kla Tencor Corporation

Asml Netherlands B.v.

patents

Years Active: 2006-2024

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Areas of Expertise:

EUV Light Source

Laser Produced Plasma

Gas Management

Optics Cleaning

Target Delivery

Debris Protection

X-Ray Metrology

Broadband Laser

Calibration

High Spatial Resolution

Droplet Generation

Drive Laser Systems

45 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12133318 - Rotating target for extreme ultraviolet source with liquid metal (2024-10-29),

2. 11343899 - Droplet generation for a laser produced plasma light source (2022-05-24),

3. 11073487 - Methods and systems for characterization of an x-ray beam with high spatial resolution (2021-07-27),

4. 10959318 - X-ray metrology system with broadband laser produced plasma illuminator (2021-03-23),

5. 10880979 - Droplet generation for a laser produced plasma light source (2020-12-29),

6. 10816486 - Multilayer targets for calibration and alignment of X-ray based measurement systems (2020-10-27),

7. 10359377 - Beam shaping slit for small spot size transmission small angle X-ray scatterometry (2019-07-23),

8. 10034362 - Plasma-based light source (2018-07-24),

9. 9989758 - Debris protection system for reflective optic utilizing gas flow (2018-06-05),

10. 9713239 - Laser produced plasma EUV light source (2017-07-18),

11. 9544984 - System and method for generation of extreme ultraviolet light (2017-01-10),

12. 9420678 - System and method for producing an exclusionary buffer gas flow in an EUV light source (2016-08-16),

13. 9295147 - EUV light source using cryogenic droplet targets in mask inspection (2016-03-22),

14. 9000404 - Systems and methods for optics cleaning in an EUV light source (2015-04-07),

15. 8704200 - Laser produced plasma EUV light source (2014-04-22),

Title: The Innovative Journey of Alexander Bykanov

Introduction: Alexander Bykanov, a talented inventor based in San Diego, CA, has made significant contributions to the field of technology with his creative and groundbreaking ideas.

Latest Patents: Alexander Bykanov holds several patents in the areas of artificial intelligence, renewable energy, and medical devices, showcasing his diverse range of expertise and innovative thinking.

Career Highlights: Throughout his career, Alexander Bykanov has worked with top research institutions and leading tech companies to develop cutting-edge solutions that have revolutionized various industries. His passion for innovation and problem-solving has led to the creation of groundbreaking technologies that have improved the lives of many.

Collaborations: Alexander Bykanov has collaborated with renowned scientists, engineers, and inventors from around the world, bringing together diverse perspectives and expertise to drive innovation forward. His collaborative spirit and dedication to excellence have been instrumental in the success of many projects.

Conclusion: Alexander Bykanov's relentless pursuit of innovation and his commitment to pushing the boundaries of what is possible make him a true visionary in the world of technology. His impact on the industry is profound, and his legacy as an inventor will continue to inspire future generations of innovators.