The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2025
Filed:
Aug. 28, 2019
Applicant:
Cymer, Llc, San Diego, CA (US);
Inventor:
Leyla Ramin, San Diego, CA (US);
Assignee:
Cymer, LLC, San Diego, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/038 (2006.01); C22C 9/00 (2006.01); C22C 19/00 (2006.01); C22C 19/07 (2006.01); H01S 3/0971 (2006.01); H01S 3/225 (2006.01);
U.S. Cl.
CPC ...
H01S 3/0388 (2013.01); C22C 9/00 (2013.01); C22C 19/002 (2013.01); C22C 19/07 (2013.01); H01S 3/0971 (2013.01); H01S 3/225 (2013.01);
Abstract
Disclosed is an electrode for a laser chamber comprising an alloy of a first metal having a first free energy of formation with fluorine greater than or equal to the free energy of formation with fluorine of copper, and a second metal having a second free energy of formation with fluorine less than the first free energy.