The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 06, 2022
Filed:
Jan. 11, 2021
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Konstantin Forcht, Aalen, DE;
Alexandra Pazidis, Essingen-Lautenburg, DE;
Christoph Zaczek, Heubach, DE;
CARL ZEISS SMT GMBH, Oberkochen, DE;
Abstract
Reflective optical element with extended service life for VUV wavelengths includes a substrate () and a metal layer () thereon. At least one metal fluoride layer () on the metal layer faces away from the substrate and at least one oxide layer () on the metal fluoride layer faces away from the substrate. The thicknesses of the layers on the metal layer facing away from the substrate are selected so that the electrical field of a standing wave, formed when a relevant wavelength is reflected, has a minimum in the region of the oxide layer. In addition, the relevant wavelength is selected so that, from a minimum VUV wavelength range to the relevant wavelengths, the integral over the extinction coefficients of the material of the at least one oxide layer is between 15% and 47% of the corresponding integral from the minimum wavelengths to a maximum wavelength.