The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2015
Filed:
Jan. 13, 2012
Karl-stefan Weissenrieder, Elchingen, DE;
Roland Loercher, Aalen-Hofherrnweiler, DE;
Alexandra Pazidis, Essingen-Lautenburg, DE;
Karl-Stefan Weissenrieder, Elchingen, DE;
Roland Loercher, Aalen-Hofherrnweiler, DE;
Alexandra Pazidis, Essingen-Lautenburg, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
A micromirror arrangement () having: at least one micromirror () having a reflective surface () formed at a mirror substrate (), and an antireflective coating () formed at the mirror substrate () outside the reflective surface (). A reflective coating () is formed within the reflective surface () and has at least two layer subsystems, wherein the first layer subsystem has layers () composed of a periodic sequence of alternate high and low refractive index layers composed of a nonmetallic material and is optimized with regard to the reflectivity in respect of a used wavelength of the micromirror arrangement, and wherein the second layer subsystem is optimized with regard to the reflectivity in respect of a measurement wavelength of the micromirror arrangement, said measurement wavelength deviating from the used wavelength.