The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2017
Filed:
Jun. 23, 2015
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventors:
Frank Schlesener, Oberkochen, DE;
Ingo Saenger, Heidenheim, DE;
Olaf Dittmann, Bopfingen, DE;
Aksel Goehnermeier, Essingen-Lauterburg, DE;
Alexandra Pazidis, Essingen-Lauterburg, DE;
Thomas Schicketanz, Aalen, DE;
Michael Patra, Oberkochen, DE;
Markus Deguenther, Aalen, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70058 (2013.01);
Abstract
A method of lithographically transferring a pattern on a light sensitive surface in a multiple exposure process comprises the following steps: