Abdurrahman Sezginer

Title: Abdurrahman Sezginer: Innovator in Photolithography and Machine Learning

Introduction

Abdurrahman Sezginer, based in Monte Sereno, California, is a prominent inventor known for his significant contributions to the fields of photolithography and machine learning. With an impressive portfolio of 107 patents, his work has paved the way for advancements in inspection technologies within the semiconductor industry.

Latest Patents

Among his latest innovations, one notable patent is focused on the "Inspection of reticles using machine learning". This invention discloses methods and apparatus for inspecting a photolithographic reticle, utilizing a sophisticated approach where a plurality of reference far field images is simulated. These images are generated from reference near field images processed through a physics-based model. The model’s input comes from a deep learning algorithm trained on the design database used to fabricate a test area of a reticle. Through a die-to-database process, this invention inspects the test area's fabricated reticle for any defects by meticulously comparing the far field images to test images captured from the reticle.

Another significant patent pertains to "Inspection with previous step subtraction". This system generates first-step images of multiple sample regions after an initial process and second-step images after subsequent modifications. It identifies one sample region as a test region while marking others as comparison regions. By creating a multi-step difference image through careful subtraction of images, the system successfully identifies defects in the test region linked to the secondary process step, enhancing efficiency in defect detection.

Career Highlights

Abdurrahman Sezginer has built a distinguished career, working with prestigious organizations such as Schlumberger Technology Corporation and Cadence Design Systems, Inc. His tenure with these companies has allowed him to engage in groundbreaking research and development, further solidifying his reputation as an expert in his field.

Collaborations

Throughout his career, Sezginer has collaborated with esteemed colleagues, including Adam Eales Norton and Kenneth C. Johnson. This network of talented professionals has played a significant role in the innovation processes and execution of projects, leading to advancements that significantly impact the industry.

Conclusion

With a vast array of patents credited to him, Abdurrahman Sezginer stands out as a leading inventor in the realm of photolithography and machine learning. His innovative work not only reflects his expertise but also showcases his drive to push the boundaries of technology for the benefit of the semiconductor industry. Through his continued efforts, he remains a key figure to watch in the ever-evolving landscape of inventions and innovations.