The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2023
Filed:
Feb. 02, 2021
Kla Corporation, Milpitas, CA (US);
Hong Chen, San Ramon, CA (US);
Bjorn Brauer, Beaverton, OR (US);
Abdurrahman Sezginer, Monte Sereno, CA (US);
Sangbong Park, Union City, CA (US);
Ge Cong, Pleasanton, CA (US);
Xiaochun Li, San Jose, CA (US);
KLA Corp., Milpitas, CA (US);
Abstract
Methods and systems for setting up inspection of a specimen are provided. One system includes one or more computer subsystems configured for acquiring a reference image for a specimen and modifying the reference image to fit the reference image to a design grid thereby generating a golden grid image. The one or more computer subsystems are also configured for storing the golden grid image for use in inspection of the specimen. The inspection includes aligning a test image of the specimen generated from output of an inspection subsystem to the golden grid image.