The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 08, 2022
Filed:
May. 04, 2018
Kla-tencor Corporation, Milpitas, CA (US);
Abdurrahman Sezginer, Monte Sereno, CA (US);
Xiaochun Li, Milpitas, CA (US);
Pavan Kumar, San Jose, CA (US);
Junqing Huang, Fremont, CA (US);
Lisheng Gao, Saratoga, CA (US);
Grace H. Chen, Los Gatos, CA (US);
Yalin Xiong, Pleasanton, CA (US);
Hawren Fang, San Jose, CA (US);
KLA-TENCOR CORPORATION, Milpitas, CA (US);
Abstract
Systems and methods increase the signal to noise ratio of optical inspection of wafers to obtain higher inspection sensitivity. The computed reference image can minimize a norm of the difference of the test image and the computed reference image. A difference image between the test image and a computed reference image is determined. The computed reference image includes a linear combination of a second set of images.