For the Inventor, By the Inventor

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Fremont, CA, United States of America

Therma-Wave, Inc.

USPTO Granted Patents = 188

% Expired Patents = 25.0

EPO Patents = 1

Trademarks = 7

Forward Citations = 6,342

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62 inventors (with patents filed for the assignee):

Jon Opsal (101 out of 126 patents)

Allan Rosencwaig (47 out of 57 patents)

Jeffrey Thomas Fanton (18 out of 29 patents)

4. Lanhua Wei (14 out of 18 patents)

5. Hanyou Chu (13 out of 34 patents)

6. David E Aspnes (13 out of 23 patents)

7. Walter Lee Smith (12 out of 18 patents)

8. Fred E Stanke (12 out of 39 patents)

9. Lena Nicolaides (11 out of 38 patents)

10. Craig E Uhrich (11 out of 20 patents)

11. Alex Salnik (11 out of 31 patents)

12. Li Chen (9 out of 25 patents)

13. David Y Wang (9 out of 13 patents)

14. Martin Ebert (8 out of 24 patents)

15. Kenneth C Johnson (8 out of 44 patents)

Core Competencies:

Scatterometry

Ellipsometry

Critical Dimension Analysis

Optical Inspection

Photothermal Systems

Measurement Systems

Semiconductor Wafers

Modulated Reflectance

Calibration

Thin Film Measurement

Sample Positioning

Detector Configurations

188 patents: Sort by Forward Citations

1. 7342661 - Method for noise improvement in ellipsometers (2008-03-11),

2. 7280215 - Photothermal system with spectroscopic pump and probe (2007-10-09),

3. 7251036 - Beam splitter/combiner for optical metrology tool (2007-07-31),

4. 7248375 - Critical dimension analysis with simultaneous multiple angle of incidence measurements (2007-07-24),

5. 7248367 - Characterization of ultra shallow junctions in semiconductor wafers (2007-07-24),

6. 7239390 - Modulated scatterometry (2007-07-03),

7. 7233390 - Scatterometry for samples with non-uniform edges (2007-06-19),

8. 7227637 - Measurement system with separate optimized beam paths (2007-06-05),

9. 7224461 - Method for determining modifications to semiconductor optical functions (2007-05-29),

10. 7215431 - Systems and methods for immersion metrology (2007-05-08),

11. 7212288 - Position modulated optical reflectance measurement system for semiconductor metrology (2007-05-01),

12. 7206125 - Infrared blocking filter for broadband Optical metrology (2007-04-17),

13. 7206071 - Detector configurations for optical metrology (2007-04-17),

14. 7206070 - Beam profile ellipsometer with rotating compensator (2007-04-17),

15. 7190460 - Focusing optics for small spot optical metrology (2007-03-13),

Company Overview

Therma-Wave, Inc., based in Fremont, CA, specializes in advanced optical metrology solutions tailored for the semiconductor industry. The company focuses on technologies such as scatterometry, ellipsometry, and critical dimension analysis, which are essential for precise measurement and inspection of semiconductor wafers. Their innovative photothermal systems and measurement systems enhance the accuracy and efficiency of optical inspection processes, supporting the evolving demands of semiconductor manufacturing and research.

Profile summary synthesized from public USPTO records and patent filings.

Company Badge

USPTO Data Jan 1 1976 - Oct 13 2026

188 Patents

#15 in Fremont, CA

#475 in California

#2,181 in US

#4,477 in the World

Fremont, CA, United States of America

Therma-Wave, Inc.

Forward Citations = 6,342

62 inventors:

Jon Opsal (101 out of 126 patents)

Allan Rosencwaig (47 out of 57 patents)

Jeffrey Thomas Fanton (18 out of 29 patents)

4. Lanhua Wei (14 out of 18 patents)

5. Hanyou Chu (13 out of 34 patents)

IDiyas Innovation Intelligence. (2026). Company Patent Portfolio: Therma-Wave, Inc.. Retrieved from https://idiyas.com/company/therma-wave

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

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