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Fremont, CA, United States of America

Therma-wave, Inc.

USPTO Granted Patents = 188

EPO Patents = 1

Trademarks = 7

Forward Citations = 6,293

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62 inventors (with patents filed for the assignee):

Jon Opsal (100 out of 126 patents)

Allan Rosencwaig (47 out of 57 patents)

Jeffrey Thomas Fanton (18 out of 29 patents)

4. Lanhua Wei (14 out of 18 patents)

5. David E Aspnes (13 out of 23 patents)

6. Hanyou Chu (12 out of 34 patents)

7. Walter Lee Smith (12 out of 15 patents)

8. Fred E Stanke (12 out of 39 patents)

9. Lena Nicolaides (11 out of 38 patents)

10. Craig E Uhrich (11 out of 20 patents)

11. Alex Salnik (11 out of 31 patents)

12. Li Chen (9 out of 25 patents)

13. David Y Wang (9 out of 13 patents)

14. Martin Ebert (8 out of 23 patents)

15. Kenneth C Johnson (8 out of 44 patents)

Core Competencies:

Optical Metrology

Ellipsometry

Scatterometry

Semiconductor Metrology

Photothermal Systems

Critical Dimension Analysis

Modulated Reflectance

Beam Splitter

Measurement Systems

Ion Implant Monitoring

Focusing Optics

Wafer Characterization

188 patents: Sort by Forward Citations

1. 7342661 - Method for noise improvement in ellipsometers (2008-03-11),

2. 7280215 - Photothermal system with spectroscopic pump and probe (2007-10-09),

3. 7251036 - Beam splitter/combiner for optical metrology tool (2007-07-31),

4. 7248375 - Critical dimension analysis with simultaneous multiple angle of incidence measurements (2007-07-24),

5. 7248367 - Characterization of ultra shallow junctions in semiconductor wafers (2007-07-24),

6. 7239390 - Modulated scatterometry (2007-07-03),

7. 7233390 - Scatterometry for samples with non-uniform edges (2007-06-19),

8. 7227637 - Measurement system with separate optimized beam paths (2007-06-05),

9. 7224461 - Method for determining modifications to semiconductor optical functions (2007-05-29),

10. 7215431 - Systems and methods for immersion metrology (2007-05-08),

11. 7212288 - Position modulated optical reflectance measurement system for semiconductor metrology (2007-05-01),

12. 7206125 - Infrared blocking filter for broadband Optical metrology (2007-04-17),

13. 7206071 - Detector configurations for optical metrology (2007-04-17),

14. 7206070 - Beam profile ellipsometer with rotating compensator (2007-04-17),

15. 7190460 - Focusing optics for small spot optical metrology (2007-03-13),

Therma-Wave, Inc. is a leading provider of advanced metrology solutions for the semiconductor and thin film industries. With over 30 years of experience, they have developed innovative technologies that enable precise measurements of thin film properties, critical for the manufacturing and quality control processes. Therma-Wave's solutions are used by semiconductor manufacturers worldwide to improve productivity, enhance yield, and ensure the performance of their products. By combining cutting-edge technology and a commitment to customer satisfaction, Therma-Wave continues to deliver reliable, accurate, and efficient metrology solutions.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 9 2025

188 Patents

#12 in Fremont, CA

#483 in California

#2,102 in US

#4,337 in the World

Fremont, CA, United States of America

Therma-wave, Inc.

Forward Citations = 6,293

62 inventors:

Jon Opsal (100 out of 126 patents)

Allan Rosencwaig (47 out of 57 patents)

Jeffrey Thomas Fanton (18 out of 29 patents)

4. Lanhua Wei (14 out of 18 patents)

5. David E Aspnes (13 out of 23 patents)

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