Location History:
- Livermore, CA (US) (1986 - 2006)
- Danville, CA (US) (2005 - 2013)
Company Filing History:
12 out of 188 
2 out of 1,787 
1 out of 1 Years Active: 1986-2013
Title: The Innovative Contributions of Walter Lee Smith
Introduction
Walter Lee Smith is a distinguished inventor based in Danville, California, known for his significant contributions to optical metrology and scatterometry. With a remarkable portfolio of 15 patents, Smith has made strides in enhancing measurement techniques that are crucial for analyzing physical structures.
Latest Patents
Among his latest patents is the "Evolution of Library Data Sets," which introduces an optical metrology system comprising a library, a metrology tool, and a library evolution tool. This innovative library is designed to include a series of predicted measurements that align with the data a metrology device would capture when examining a physical structure. The metrology tool plays a vital role by comparing empirical measurements to the predicted ones in the library. When a match is identified, it extracts a description of the corresponding physical structure. The library evolution tool further enhances efficiency by statistically analyzing usage patterns and adjusting the resolution of the library based on this analysis. Another notable patent is for "Modulated Scatterometry," which details an apparatus for conducting scatterometry measurements. This apparatus features a modulated pump source to excite the sample, while a separate probe beam interacts with it to measure the modulated optical response. The data collected undergoes scatterometry analysis to evaluate geometrical features that cause light scattering.
Career Highlights
Walter Lee Smith has had a successful career, working with prominent companies such as Therma-Wave, Inc. and KLA-Tencor Corporation. His experience in these organizations has allowed him to refine his skills and contribute to advancements in measurement technologies.
Collaborations
Throughout his career, Smith has collaborated with notable individuals, including Allan Rosencwaig and Jon Opsal. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.
Conclusion
Walter Lee Smith's contributions to the fields of optical metrology and scatterometry exemplify his innovative spirit and dedication to advancing measurement techniques. His work continues to influence the industry and inspire future inventors.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.