Location History:
- Stony Brook, NY (US) (1977)
- Sunnyvale, CA (US) (1990 - 1992)
- Santa Clara, CA (US) (1999 - 2017)
Company Filing History:
14 out of 10,295 
8 out of 188 
2 out of 1,787 
Years Active: 1977-2017
Title: Kenneth C. Johnson: A Pioneer in Lithography Technology
Introduction
Kenneth C. Johnson is an esteemed inventor based in Santa Clara, California, recognized for his impressive portfolio of 41 patents. His work has significantly advanced the fields of lithography and optics, contributing to technologies used in modern electronic manufacturing.
Latest Patents
Among Kenneth's latest innovations are two noteworthy patents. The first is the **Scanned-spot-array DUV lithography system**, which features an array of phase-Fresnel microlenses. This system effectively focuses multiple radiation beams, enabling ultra-high-resolution and high-throughput maskless printing capabilities. The integration of modulators such as micromechanical shutters and transmission grating modulators enhances the system’s efficiency by providing fine control over the exposure of photosensitive layers.
The second patent, **EUV light source with spectral purity filter and power recycling**, describes a cutting-edge plasma-generated EUV light source that utilizes a specialized diffracting collection mirror. This technology channels spectrally pure radiation while efficiently recycling out-of-band radiation back to the plasma. This innovative design significantly enhances the generation of quality EUV radiation, highlighting Kenneth's commitment to pushing the boundaries of optical technology.
Career Highlights
Throughout his career, Kenneth has made remarkable contributions while working at various companies, notably at Tokyo Electron Limited. His innovative designs and systems have played a crucial role in the evolution of lithography technology, elevating the standards of precision in manufacturing processes.
Collaborations
Kenneth’s successes in the field are complemented by his collaborations with talented individuals such as Fred E. Stanke and Abdurrahman Sezginer. Together, they have contributed to advancements that have shaped the industry and inspired future innovations.
Conclusion
Kenneth C. Johnson's contributions to lithography and optics showcase his ingenuity and commitment to innovation. With 41 patents to his name, his work continues to influence the development of high-tech manufacturing processes, ensuring that he remains a key figure in the realm of technology and invention.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.