= 3.74 Inventors with similar research interests:
Years Active: 1985-2014
Title: Jon Opsal: A Pioneer in Optical Metrology and Reflectance Measurement Systems
Introduction:
In the world of innovations and patents, some individuals stand out for their groundbreaking contributions. Jon Opsal, based in Livermore, CA (US), is one such visionary inventor. With an impressive number of 126 patents to his name, Opsal has revolutionized the field of optical metrology and reflectance measurement systems. This article will delve into Opsal's latest patents, career highlights, collaborations, and his numerous contributions to the industry.
Latest Patents:
Opsal's recent patents exemplify his expertise and commitment to advancing optical metrology techniques. One such invention is the "Modulated Reflectance Measurement System Using UV Probe." This system utilizes lasers for generating an intensity-modulated pump beam and a UV probe beam. By focusing these beams on a measurement site within a sample, Opsal enables precise temperature reflectance coefficient measurements, facilitating accurate analysis in various applications.
Another notable invention by Opsal is the "High Resolution Monitoring of CD Variations" method. This optical metrology technique evaluates the uniformity of characteristics within a semiconductor region with repeating features. Opsal's approach involves using a probe laser beam with a micron-sized spot size, enabling detailed measurements for comparison with calibration information derived from other technologies such as spectroscopic reflectometry or spectroscopic ellipsometry.
Career Highlights:
Opsal's career boasts significant achievements and breakthrough contributions. He has worked with distinguished companies in the industry, including Therma-Wave, Inc. and KLA-Tencor Corporation. These companies are renowned for their advancements in semiconductor metrology and inspection systems. Opsal's experience and expertise in these organizations have undoubtedly influenced and shaped the field of optical metrology.
Collaborations:
Throughout his career, Opsal has had the opportunity to collaborate with talented individuals. Two notable co-workers are Allan Rosencwaig and Lena Nicolaides. Rosencwaig is a renowned scientist and co-founder of Therma-Wave, Inc., where Opsal made noteworthy contributions. Nicolaides, on the other hand, is a highly accomplished researcher who has made significant advancements in the field of spectroscopic ellipsometry. Opsal's collaborations with these individuals have undoubtedly contributed to his innovative work.
Conclusion:
Jon Opsal's expertise lies in the development of optical metrology and reflectance measurement systems. With an impressive portfolio of patents and associations with reputable companies like Therma-Wave, Inc. and KLA-Tencor Corporation, Opsal has left an indelible mark on the field. His latest patents, such as the modulated reflectance measurement system and high-resolution monitoring of CD variations, are a testament to his ingenuity and dedication to advancing innovation in the industry. The realm of optical metrology owes much to the pioneering contributions of Jon Opsal, a visionary inventor who continues to push the boundaries of technology.
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