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Milpitas, CA, United States of America

Kla-Tencor Technologies Corporation

USPTO Granted Patents = 641

EPO Patents = 28

Trademarks = 12

Forward Citations = 12,659

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634 inventors (with patents filed for the assignee):

Ady Levy (55 out of 85 patents)

Michael E Adel (39 out of 87 patents)

Mehrdad Nikoonahad (39 out of 69 patents)

4. Christopher F Bevis (38 out of 54 patents)

5. John Fielden (36 out of 139 patents)

6. David Lewis Adler (35 out of 75 patents)

7. Dan Wack (33 out of 37 patents)

8. Mehdi Vaez-Iravani (30 out of 103 patents)

9. Gary Janik (30 out of 43 patents)

10. Mark Ghinovker (30 out of 81 patents)

11. Yung-Ho Alex Chuang (28 out of 159 patents)

12. Kyle A Brown (28 out of 37 patents)

13. Walter Dean Mieher (26 out of 43 patents)

14. Gary Bultman (24 out of 26 patents)

15. J Joseph Armstrong (22 out of 68 patents)

Core Competencies:

Wafer Inspection

Lithography Processes

Defect Classification

Overlay Measurement

Optical Imaging Systems

Substrate Topography

EUV Source Technology

Defect Detection

Chemical Etching

TDI Sensors

Semiconductor Device Monitoring

Process Condition Sensing

641 patents: Sort by Forward Citations

1. 11348222 - Methods and systems for inspection of wafers and reticles using designer intent data (2022-05-31),

2. 11204330 - Systems and methods for inspection of a specimen (2021-12-21),

3. 10713771 - Methods and systems for inspection of wafers and reticles using designer intent data (2020-07-14),

4. 9401014 - Methods and systems for utilizing design data in combination with inspection data (2016-07-26),

5. 9188974 - Methods for improved monitor and control of lithography processes (2015-11-17),

6. 9068917 - Systems and methods for inspection of a specimen (2015-06-30),

7. 9053833 - DC high-voltage super-radiant free-electron based EUV source (2015-06-09),

8. 9052494 - Optical imaging system with catoptric objective; broadband objective with mirror; and refractive lenses and broadband optical imaging system having two or more imaging paths (2015-06-09),

9. 9037280 - Computer-implemented methods for performing one or more defect-related functions (2015-05-19),

10. 9002497 - Methods and systems for inspection of wafers and reticles using designer intent data (2015-04-07),

11. 8924014 - Dual scanning stage (2014-12-30),

12. 8923600 - Methods and systems for utilizing design data in combination with inspection data (2014-12-30),

13. 8831767 - Methods and systems for monitoring a parameter of a measurement device during polishing, damage to a specimen during polishing, or a characteristic of a polishing pad or tool (2014-09-09),

14. 8768665 - Site based quantification of substrate topography and its relation to lithography defocus and overlay (2014-07-01),

15. 8765496 - Methods and systems for measuring a characteristic of a substrate or preparing a substrate for analysis (2014-07-01),

KLA-Tencor Technologies Corporation is a leading provider of process control and yield management solutions for the semiconductor and related nanoelectronics industries. Their innovative products and technologies help customers improve performance, yield, and cost effectiveness of their semiconductor devices. With a strong commitment to research and development, KLA-Tencor is continually pushing boundaries and driving advancements in the industry.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Jan 20 2026

641 Patents

#10 in Milpitas, CA

#175 in California

#747 in US

#1,502 in the World

Milpitas, CA, United States of America

Kla-Tencor Technologies Corporation

Forward Citations = 12,659

634 inventors:

Ady Levy (55 out of 85 patents)

Michael E Adel (39 out of 87 patents)

Mehrdad Nikoonahad (39 out of 69 patents)

4. Christopher F Bevis (38 out of 54 patents)

5. John Fielden (36 out of 139 patents)

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