The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2015
Filed:
Mar. 30, 2010
Shiow-hwei Hwang, San Ramon, CA (US);
Gregory L. Kirk, Pleasanton, CA (US);
Hwan J. Jeong, Los Altos, CA (US);
David Shafer, Fairfield, CT (US);
Russel Hudyma, San Ramon, CA (US);
Shiow-Hwei Hwang, San Ramon, CA (US);
Gregory L. Kirk, Pleasanton, CA (US);
Hwan J. Jeong, Los Altos, CA (US);
David Shafer, Fairfield, CT (US);
Russel Hudyma, San Ramon, CA (US);
KLA-Tencor Technologies Corporation, Milptas, CA (US);
Abstract
An optical system may include an objective having at least four mirrors including an outermost mirror with aspect ratio <20:1 and focusing optics including a refractive optical element. The objective provides imaging at numerical aperture >0.7, central obscuration <35% in pupil. An objective may have two or more mirrors, one with a refractive module that seals off an outermost mirror's central opening. A broad band imaging system may include one objective and two or more imaging paths that provide imaging at numerical aperture >0.7 and field of view >0.8 mm. An optical imaging system may comprise an objective and two or more imaging paths. The imaging paths may provide two or more simultaneous broadband images of a sample in two or more modes. The modes may have different illumination and/or collection pupil apertures or different pixel sizes at the sample.