The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2009
Filed:
Oct. 04, 2006
Jon Opsal, Livermore, CA (US);
Hanyou Chu, San Jose, CA (US);
Xuelong Cao, Fremont, CA (US);
Youxian Wen, Livermore, CA (US);
Jon Opsal, Livermore, CA (US);
Hanyou Chu, San Jose, CA (US);
Xuelong Cao, Fremont, CA (US);
Youxian Wen, Livermore, CA (US);
KLA-Tencor Corp., Milpitas, CA (US);
Abstract
A method for modeling samples includes the use of control points to define lines profiles and other geometric shapes. Each control point used within a model influences a shape within the model. Typically, the control points are used in a connect-the-dots fashion where a set of dots defines the outline or profile of a shape. The layers within the sample are typically modeled independently of the shape defined using the control points. The overall result is to minimize the number of parameters used to model shapes while maintaining the accuracy of the resulting scatterometry models.