The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 12, 2010
Filed:
Jan. 30, 2008
Jon Opsal, Livermore, CA (US);
Lena Nicolaides, Castro Valley, CA (US);
Alex Salnik, Castro Valley, CA (US);
Allan Rosencwaig, Danville, CA (US);
Jon Opsal, Livermore, CA (US);
Lena Nicolaides, Castro Valley, CA (US);
Alex Salnik, Castro Valley, CA (US);
Allan Rosencwaig, Danville, CA (US);
KLA-Tencor Corporation, San Jose, CA (US);
Abstract
A modulated reflectance measurement system includes lasers for generating an intensity modulated pump beam and a UV probe beam. The pump and probe beams are focused on a measurement site within a sample. The pump beam periodically excites the measurement site and the modulation is imparted to the probe beam. For one embodiment, the wavelength of the probe beam is selected to correspond to a local maxima of the temperature reflectance coefficient of the sample. For a second embodiment, the probe laser is tuned to either minimize the thermal wave contribution to the probe beam modulation or to equalize the thermal and plasma wave contributions to the probe beam modulation.