The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2009
Filed:
Aug. 04, 2008
Lena Nicolaides, Castro Valley, CA (US);
Jeffrey T. Fanton, Los Altos, CA (US);
Alex Salnik, Castro Valley, CA (US);
Jon Opsal, Livermore, CA (US);
Lena Nicolaides, Castro Valley, CA (US);
Jeffrey T. Fanton, Los Altos, CA (US);
Alex Salnik, Castro Valley, CA (US);
Jon Opsal, Livermore, CA (US);
KLA-Tencor Corp., Milpitas, CA (US);
Abstract
A modulated reflectance measurement system includes three monochromatic diode-based lasers. Each laser can operate as a probe beam or as a pump beam source. The laser outputs are redirected using a series of mirrors and beam splitters to reach an objective lens. The objective lens focuses the laser outputs on a sample. Reflected energy returns through objective and is redirected by a beam splitter to a detector. A lock-in amplifier converts the output of the detector to produce quadrature (Q) and in-phase (I) signals for analysis. A Processor uses the Q and/or I signals to analyze the sample. By changing the number of lasers used as pump or probe beam sources, the measurement system can be optimized to measure a range of different samples types.