The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2009
Filed:
Aug. 06, 2007
Alex Salnik, Castro Valley, CA (US);
Lena Nicolaides, Castro Valley, CA (US);
Jon Opsal, Livermore, CA (US);
Alex Salnik, Castro Valley, CA (US);
Lena Nicolaides, Castro Valley, CA (US);
Jon Opsal, Livermore, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
The present invention provides a probe beam profile—modulated optical reflectivity metrology system having a modulated pump source for exciting the sample. A separate probe beam is directed to interact with the sample in a manner so that the rays within the probe beam create a spread of angles of incidence. A detector array simultaneously measures intensities of the rays within the reflected/diffracted probe beam simultaneously at different angles of incidence. The intensity and angle of incidence information is used to analyze the sample.