Kawasaki, Japan

Riki Ogawa

This inventor holds 64 USPTO granted patents and 9 published patent applications, primarily in Electron Beam Inspection (CPC class G01N). Top assignees: Nuflare Technology, Inc., Kabushiki Kaisha Toshiba, Nec Corporation. Active years: 2005-2025.

USPTO Granted Patents = 64 

% Patents Active = 92.2

Average Co-Inventor Count = 2.0

ph-index = 4

Forward Citations = 86(Granted Patents)

Forward Citations (Not Self Cited) = 70(Dec 10, 2025)


Inventors with similar research interests:


Location History:

  • Kanagawa, JP (2008 - 2019)
  • Yokohama, JP (2005 - 2020)
  • Kawasaki, JP (2006 - 2022)

Company Filing History:


Years Active: 2005-2025

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Areas of Expertise:
Inspection Apparatus
Multibeam Inspection
Electron Beam
Pattern Inspection
Charged Particle Beam
Defect Detection
Irradiation Method
Displacement Measurement
Focusing Method
Template Substrate
Image Capturing
Polarized Image Acquisition
64 patents (USPTO):Explore Patents

Title: Riki Ogawa: A Pioneer in Inspection Technology

Introduction: Riki Ogawa is a renowned inventor based in Kawasaki, Japan, recognized for his significant contributions to the field of inspection technology. With a remarkable total of 63 patents, Ogawa has made a substantial impact in various industries, focusing on innovative inspection apparatus and methods.

Latest Patents: Riki Ogawa's latest patents showcase his expertise in advanced inspection systems. One notable invention is an inspection apparatus that includes an irradiation source which directs an electron beam onto a first pattern on an inspection target object. This apparatus features a detection circuit that generates an inspection image and employs a filter circuit to smooth the image, enabling a precise comparison against a predetermined reference image.

Another exceptional invention is a multibeam inspection apparatus that utilizes multi-primary electron beams. This system comprises a stage for mounting objects, a multibeam column for irradiation, and a multi-detector that compares overlapping images to adjust sensitivity and correct beam intensity differences, exemplifying Ogawa's innovative approach to enhancing inspection accuracy.

Career Highlights: Riki Ogawa has had an impressive career, working at leading companies such as Nuflare Technology, Inc. and Kabushiki Kaisha Toshiba, where he honed his skills in developing cutting-edge technologies. His work has paved the way for advancements in inspection methodologies, benefiting several sectors, including manufacturing and quality control.

Collaborations: Throughout his career, Ogawa has collaborated with esteemed colleagues, including Masataka Shiratsuchi and Hideo Tsuchiya. These partnerships have further enriched his work and contributed to the development of groundbreaking technologies in the field of inspection.

Conclusion: Riki Ogawa's impressive portfolio of patents and his dedication to innovation solidify his status as a leading figure in inspection technology. His contributions continue to influence the industry, paving the way for future advancements and enhancing the precision and efficiency of inspection processes globally.

Profile summary based on public USPTO records.
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