The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2020
Filed:
Aug. 17, 2018
Nuflare Technology, Inc., Yokohama, JP;
Masataka Shiratsuchi, Kawasaki, JP;
Riki Ogawa, Kawasaki, JP;
Hideaki Hashimoto, Yokohama, JP;
Kazuhiro Nakashima, Kawasaki, JP;
Ryoichi Hirano, Setagaya-ku, JP;
Hideo Tsuchiya, Setagaya-ku, JP;
Chosaku Noda, Yokohama, JP;
NuFlare Technology, Inc., Yokohama, JP;
Abstract
According to one aspect of the present invention, a pattern inspection apparatus includes: a first sub-pixel interpolation processing circuitry configured to calculate a pixel value of a reference image corresponding to a position of each pixel of the inspection target image by performing an interpolation process using at least one pixel value of the reference image for each shift amount while variably and relatively shifting the inspection target image and the reference image by the unit of a sub-pixel using the reference image corresponding to the inspection target image; and an SSD calculation processing circuitry configured to calculate a sum of squared difference between each pixel value of the inspection target image and a corresponding pixel value of the reference image subjected to a filter process for the each shift amount.