The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2025
Filed:
Jun. 07, 2022
Nuflare Technology, Inc., Yokohama, JP;
Riki Ogawa, Kawasaki, JP;
NuFlare Technology, Inc., Yokohama, JP;
Abstract
Provided is an inspection apparatus including: an irradiation source irradiating an electron beam to a pattern of an inspection target object, the inspection target object having a first surface and a second surface having the pattern; a first voltage application circuit applying a first voltage to the first surface; a second voltage application circuit applying a second voltage to the second surface; and a detector for acquiring an inspection image generated from the pattern by irradiating the electron beam, wherein |V−V|=|V|<|V| is satisfied, when an acceleration voltage of an electron included in the electron beam is V, an incident voltage of the electron reaching the second surface is denoted by V, the first voltage is denoted by V, and the second voltage is denoted by V.