The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2022
Filed:
May. 23, 2019
Kla-tencor Corporation, Milpitas, CA (US);
Hong Xiao, Pleasanton, CA (US);
Lawrence Muray, Milpitas, CA (US);
Nick Petrone, Milpitas, CA (US);
John Gerling, Livermore, CA (US);
Abdurrahman Sezginer, Monte Sereno, CA (US);
Alan D. Brodie, Palo Alto, CA (US);
Kuljit Virk, Fremont, CA (US);
Qiang Q. Zhang, San Jose, CA (US);
Grace Hsiu-Ling Chen, Los Gatos, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
A system is disclosed. In one embodiment, the system includes a scanning electron microscopy sub-system including an electron source configured to generate an electron beam and an electron-optical assembly including one or more electron-optical elements configured to direct the electron beam to the specimen. In another embodiment, the system includes one or more grounding paths coupled to the specimen, the one or more grounding paths configured to generate one or more transmission signals based on one or more received electron beam-induced transmission currents. In another embodiment, the system includes a controller configured to: generate control signals configured to cause the scanning electron microscopy sub-system to scan the portion of the electron beam across a portion of the specimen; receive the transmission signals via the one or more grounding paths; and generate transmission current images based on the transmission signals.