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Hitachi Tokyo Electronics Co., Ltd.

USPTO Granted Patents = 21

Forward Citations = 425

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81 inventors (with patents filed for the assignee):

Yasuhiro Mitsui (4 out of 39 patents)

Takashi Irie (3 out of 13 patents)

Keiji Hasumi (3 out of 3 patents)

4. Shigeki Tozawa (2 out of 13 patents)

5. Mari Nozoe (2 out of 73 patents)

6. Hidetoshi Nishiyama (2 out of 109 patents)

7. Shigeaki Hijikata (2 out of 5 patents)

8. Koji Abe (2 out of 4 patents)

9. Takayoshi Kogano (2 out of 13 patents)

10. Kimio Muramatsu (2 out of 9 patents)

11. Shunichi Iimuro (2 out of 6 patents)

12. Masatomo Kanegae (2 out of 2 patents)

13. Fumio Ito (2 out of 2 patents)

14. Takashi Nagaoka (2 out of 13 patents)

15. Ichiro Gyobu (2 out of 4 patents)

21 patents: Sort by Forward Citations

1. 8558173 - Method of inspecting pattern and inspecting instrument (2013-10-15),

2. 7163886 - Semiconductor integrated circuit device and process for manufacturing the same (2007-01-16),

3. 7112791 - Method of inspecting pattern and inspecting instrument (2006-09-26),

4. 6664549 - Wafer chuck, exposure system, and method of manufacturing semiconductor device (2003-12-16),

5. 6146920 - Bump formation method (2000-11-14),

6. 5593540 - Plasma etching system and plasma etching method (1997-01-14),

7. 5485016 - Atmospheric pressure ionization mass spectrometer (1996-01-16),

8. 5482524 - Atmospheric pressure, elevated temperature gas desorption apparatus (1996-01-09),

9. 5423936 - Plasma etching system (1995-06-13),

10. 5304797 - Gas analyzer for determining impurity concentration of highly-purified (1994-04-19),

11. 5173719 - Method and apparatus for the inspection of patterns (1992-12-22),

12. 5080039 - Processing apparatus (1992-01-14),

13. 5062771 - Vacuum system with a secondary gas also connected to the roughing pump (1991-11-05),

14. 5060841 - wire bonding method and apparatus and method of producing semiconductor (1991-10-29),

15. 5031821 - Semiconductor integrated circuit device, method for producing or (1991-07-16),

Hitachi Tokyo Electronics Co., Ltd. is a leading global electronic and electrical equipment company based in Tokyo, Japan. The company specializes in manufacturing a wide range of products, including semiconductors, display devices, automotive systems, and industrial machinery. With a strong focus on innovation and quality, Hitachi Tokyo Electronics is dedicated to providing cutting-edge solutions to its customers worldwide.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 30 2025

21 Patents

#1,139 in Tokyo

#2,802 in Japan

#29,081 in the World

Hitachi Tokyo Electronics Co., Ltd.

Forward Citations = 425

81 inventors:

Yasuhiro Mitsui (4 out of 39 patents)

Takashi Irie (3 out of 13 patents)

Keiji Hasumi (3 out of 3 patents)

4. Shigeki Tozawa (2 out of 13 patents)

5. Mari Nozoe (2 out of 73 patents)

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