The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2006
Filed:
Aug. 12, 2004
Mari Nozoe, Hino, JP;
Hidetoshi Nishiyama, Kokubunji, JP;
Shigeaki Hijikata, Ome, JP;
Kenji Watanabe, Ome, JP;
Koji Abe, Hitachinaka, JP;
Mari Nozoe, Hino, JP;
Hidetoshi Nishiyama, Kokubunji, JP;
Shigeaki Hijikata, Ome, JP;
Kenji Watanabe, Ome, JP;
Koji Abe, Hitachinaka, JP;
Hitachi Tokyo Electronics Co. Ltd., Tokyo, JP;
Abstract
A sample inspection system having a sample stage holding a sample to be inspected, electron beam optics so as to radiate an electron beam to the sample, a detector unit that detects a secondly generated signal generated in response to radiation of the sample by the electron beam, a storage for storing a plurality of images obtained from the generated signal and information for classifying the plurality of images by a type of defect in the sample, and an image processing unit. The image processing unit retrieves any of the plurality of images and classifies the retrieved image depending on the type of defect including an electrical defect and a defect in the figure.