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Years Active: 2003-2013
Title: Shigeaki Hijikata: Innovator in Semiconductor Inspection Technologies
Introduction
Shigeaki Hijikata is a notable inventor based in Ome, Japan. He has made significant contributions to the field of semiconductor inspection technologies, holding a total of 5 patents. His work focuses on improving the methods and systems used to detect defects in semiconductor wafers.
Latest Patents
Hijikata's latest patents include a method of inspecting patterns and an inspecting instrument. One of his inventions is an electron beam apparatus equipped with a review function for semiconductor wafers. This apparatus utilizes a scanning electron microscope to obtain image information of the wafer. The information processing apparatus processes this image information and includes a data input unit for receiving positional information of defects, a storage unit for multiple images corresponding to the defect positions, and an image processing unit that classifies the retrieved images based on defect types.
Another significant patent is a defect inspection method and system aimed at preventing failures in defect detection caused by saturation of pattern signals. This method involves irradiating laser light on an inspected object with a pattern, detecting signals, and inputting pattern information from layout data. The system estimates saturation levels and determines transmittance conditions to ensure accurate signal detection.
Career Highlights
Throughout his career, Shigeaki Hijikata has worked with prominent companies, including Hitachi Tokyo Electronics Co., Ltd. His expertise in semiconductor technologies has positioned him as a key figure in the industry.
Collaborations
Hijikata has collaborated with notable professionals in his field, including Mari Nozoe and Hidetoshi Nishiyama. These collaborations have contributed to the advancement of semiconductor inspection technologies.
Conclusion
Shigeaki Hijikata's innovative work in semiconductor inspection has led to the development of advanced methods and systems that enhance defect detection. His contributions continue to impact the semiconductor industry positively.