The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 1992
Filed:
Dec. 19, 1990
Applicant:
Inventors:
Yuzo Taniguchi, Higashimurayama, JP;
Tooru Fukui, Hamura, JP;
Mikihito Saito, Tokyo, JP;
Yoshiichi Hori, Kodaira, JP;
Takahiro Kamagata, Honmachi, JP;
Assignees:
Hitachi, Ltd., Tokyo, JP;
Hitachi Tokyo Electronics Co., Ltd., Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ; G01N / ;
U.S. Cl.
CPC ...
356394 ; 356237 ;
Abstract
The present invention relates to a technique, in the inspection of a defect of a semiconductor memory or the like, in which chip comparison is separated from repetitive pattern comparison in a region of a wafer to be inspected whereby both the comparisons are rendered possible to perform in parallel in one and the same scanning.