Hikari, Japan

Saburou Kanai


Average Co-Inventor Count = 5.7

ph-index = 10

Forward Citations = 279(Granted Patents)


Company Filing History:


Years Active: 2000-2014

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23 patents (USPTO):Explore Patents

Title: The Innovations of Saburou Kanai in Plasma Processing Technologies

Introduction

Saburou Kanai, an esteemed inventor based in Hikari, Japan, is celebrated for his significant contributions to the field of plasma processing technology. With a total of 23 patents to his name, Kanai has been instrumental in advancing the efficiency and functionality of plasma processing apparatuses. His work serves as a foundation for numerous industrial applications.

Latest Patents

Kanai's latest inventions focus on enhancing plasma processing capabilities. One of his key patents, titled "Plasma processing apparatus and method," introduces an apparatus comprising a sample stage positioned in the lower section of a processing chamber. The design features a bell jar crafted from insulative material that forms the upper part of a vacuum vessel. A coil antenna surrounds the bell jar and generates plasma within the processing space. Furthermore, the inclusion of a Faraday shield and a ring-shaped member made of electrically conductive material optimizes the plasma generation process. Another noteworthy patent presents similar enhancements, incorporating a gas ring member that supplies process gases efficiently to the plasma generating space.

Career Highlights

Throughout his career, Kanai has been affiliated with prominent companies such as Hitachi High-Technologies Corporation and Hitachi, Ltd. His tenure at these organizations has allowed him to leverage his innovative thinking, leading to groundbreaking advancements in plasma technology.

Collaborations

Kanai has collaborated with notable coworkers, including Ken Yoshioka and Ryoji Nishio. Their combined expertise and innovative efforts have further propelled Kanai's research and development initiatives, fostering new ideas and patents in the realm of plasma processing.

Conclusion

Saburou Kanai's advancements in plasma processing are not only remarkable but also pivotal in shaping the future of various technologies. His extensive patent portfolio illustrates his dedication to innovation and the practical application of plasma technology, positioning him as a leading figure in his field. Through his continued efforts, Kanai embodies the spirit of invention, inspiring future generations of inventors and researchers.

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