Kyoto, Japan

Jiro Matsuo

USPTO Granted Patents = 16 

 

Average Co-Inventor Count = 4.3

ph-index = 6

Forward Citations = 153(Granted Patents)


Location History:

  • Kyoto-shi, Kyoto-fu, JP (2002)
  • Uji, JP (2011 - 2013)
  • Kyoto, JP (2000 - 2018)

Company Filing History:


Years Active: 2000-2018

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16 patents (USPTO):Explore Patents

Title: Jiro Matsuo: Innovator in Substrate Cleaning and Surface Smoothing Technologies

Introduction

Jiro Matsuo is a prominent inventor based in Kyoto, Japan. He has made significant contributions to the field of substrate cleaning and surface smoothing technologies. With a total of 16 patents to his name, Matsuo's work has advanced the efficiency and effectiveness of various processes in semiconductor manufacturing and material science.

Latest Patents

Matsuo's latest patents include innovative methods and devices aimed at improving substrate cleaning and surface smoothing. One of his notable inventions is a substrate cleaning method that effectively removes particles adhered to a substrate. This method involves acquiring particle information, controlling factors related to gas cluster sizes, and ejecting a cleaning gas at higher pressure to generate gas clusters. This process allows for the efficient removal of particles, even from recesses in circuit patterns.

Another significant patent is the method of smoothing a solid surface using a gas cluster ion beam. This technique addresses scratches on solid surfaces by emitting a gas cluster ion beam that exposes remaining substances on the side-walls of the scratches to other gas clusters. The non-concentric and non-uniform divergence of the gas cluster ion beam enhances the smoothing process.

Career Highlights

Throughout his career, Jiro Matsuo has worked with notable organizations, including Japan Aviation Electronics Industry, Limited and Kyoto University. His experience in these institutions has allowed him to develop and refine his innovative technologies, contributing to advancements in the field.

Collaborations

Matsuo has collaborated with esteemed colleagues such as Toshio Seki and Isao Yamada. These partnerships have fostered a collaborative environment that encourages the exchange of ideas and expertise, further enhancing the impact of his inventions.

Conclusion

Jiro Matsuo's contributions to substrate cleaning and surface smoothing technologies have established him as a leading inventor in his field. His innovative patents and collaborative efforts continue to influence advancements in semiconductor manufacturing and material science.

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