The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 09, 2013

Filed:

Oct. 30, 2007
Applicants:

Akiko Suzuki, Tokyo, JP;

Akinobu Sato, Tokyo, JP;

Emmanuel Bourelle, Montmirail, FR;

Jiro Matsuo, Kyoto, JP;

Toshio Seki, Kyoto, JP;

Inventors:

Akiko Suzuki, Tokyo, JP;

Akinobu Sato, Tokyo, JP;

Emmanuel Bourelle, Montmirail, FR;

Jiro Matsuo, Kyoto, JP;

Toshio Seki, Kyoto, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G21K 5/04 (2006.01);
U.S. Cl.
CPC ...
Abstract

Surface roughness having intervals of several tens of nanometers to about a hundred micrometers in a solid surface is reduced by directing a gas cluster ion beam to the surface. An angle formed between the normal to the solid surface and the gas cluster ion beam is referred to as an irradiation angle, and an irradiation angle at which the distance of interaction between the solid and the cluster colliding with the solid dramatically increases is referred to as a critical angle. A solid surface smoothing method includes an irradiation step of directing the gas cluster ion beam onto the solid surface at an irradiation angle not smaller than the critical angle. The critical angle is 70°.


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