The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2017
Filed:
Nov. 04, 2015
Japan Aviation Electronics Industry, Limited, Shibuya-ku, Tokyo, JP;
Akinobu Sato, Tokyo, JP;
Akiko Suzuki, Tokyo, JP;
Emmanuel Bourelle, Montmirail, FR;
Jiro Matsuo, Kyoto, JP;
Toshio Seki, Kyoto, JP;
JAPAN AVIATION ELECTRONICS INDUSTRY, LIMITED, Tokyo, JP;
Abstract
A method of smoothing a solid surface with a gas cluster ion beam includes irradiating the solid surface with the gas cluster ion beam. The irradiating includes, when scratches which can be likened to a line-and-space pattern structure with widths and heights on the order of a submicrometer to micrometer are present on the solid surface, a process of emitting the gas cluster ion beam so as to expose substances, which remain on side-walls of the scratches due to lateral transferal caused by collisions with gas clusters, to other gas clusters, and the gas cluster ion beam diverges non-concentrically and/or non-uniformly.