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Billerica, MA, United States of America

Epion Corporation

USPTO Granted Patents = 31

Trademarks = 5

Forward Citations = 914

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28 inventors (with patents filed for the assignee):

Allen R Kirkpatrick (8 out of 22 patents)

Jerald P Dykstra (6 out of 18 patents)

Michael E Mack (5 out of 18 patents)

4. Matthew C Gwinn (4 out of 23 patents)

5. Richard P Torti (4 out of 4 patents)

6. David B Fenner (4 out of 4 patents)

7. Wesley J Skinner (4 out of 8 patents)

8. Isao Yamada (3 out of 15 patents)

9. John J Hautala (3 out of 99 patents)

10. Sean R Kirkpatrick (2 out of 36 patents)

11. Robert K Becker (2 out of 10 patents)

12. David Richard Swenson (2 out of 5 patents)

13. David J Mount (2 out of 6 patents)

14. James A Greer (2 out of 11 patents)

15. Bruce K Libby (2 out of 2 patents)

31 patents: Sort by Forward Citations

1. 7173252 - Ionizer and method for gas-cluster ion-beam formation (2007-02-06),

2. 7115511 - GCIB processing of integrated circuit interconnect structures (2006-10-03),

3. 7067828 - Method of and apparatus for measurement and control of a gas cluster ion beam (2006-06-27),

4. 7060989 - Method and apparatus for improved processing with a gas-cluster ion beam (2006-06-13),

5. 7060988 - Method and apparatus for improved beam stability in high current gas-cluster ion beam processing system (2006-06-13),

6. 6831272 - Gas cluster ion beam size diagnostics and workpiece processing (2004-12-14),

7. 6812147 - GCIB processing to improve interconnection vias and improved interconnection via (2004-11-02),

8. 6811765 - Thermal treatment of fine grain materials in a coarse-grain fluidized bed (2004-11-02),

9. 6805807 - Adaptive GCIB for smoothing surfaces (2004-10-19),

10. 6770874 - Gas cluster ion beam size diagnostics and workpiece processing (2004-08-03),

11. 6750460 - System and method for adjusting the properties of a device by GCIB processing (2004-06-15),

12. 6737643 - Detector and method for cluster ion beam diagnostics (2004-05-18),

13. 6676989 - Method and system for improving the effectiveness of medical stents by the application of gas cluster ion beam technology (2004-01-13),

14. 6660340 - Diamond-like carbon film with enhanced adhesion (2003-12-09),

15. 6646277 - Charging control and dosimetry system for gas cluster ion beam (2003-11-11),

Epion Corporation is a leading technology company specializing in innovative solutions for the semiconductor industry. With a dedicated team of engineers and scientists, we develop advanced equipment and processes to meet the increasing demands of the market. Our cutting-edge technologies and systems are used by major semiconductor manufacturers worldwide, enabling efficient and precise production of integrated circuits. Visit our website to learn more about our products, services, and the transformative role we play in shaping the semiconductor industry.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 23 2025

31 Patents

#26 in Billerica, MA

#622 in Massachusetts

#10,550 in US

#20,624 in the World

Billerica, MA, United States of America

Epion Corporation

Forward Citations = 914

28 inventors:

Allen R Kirkpatrick (8 out of 22 patents)

Jerald P Dykstra (6 out of 18 patents)

Michael E Mack (5 out of 18 patents)

4. Matthew C Gwinn (4 out of 23 patents)

5. Richard P Torti (4 out of 4 patents)

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