Company Filing History:
Years Active: 2002-2003
Title: Innovations by Bruce K. Libby
Introduction
Bruce K. Libby is an accomplished inventor based in Groveland, MA (US). He has made significant contributions to the field of gas cluster ion beam technology, holding two patents that showcase his innovative approach to processing and surface smoothing.
Latest Patents
His latest patents include a "Charging control and dosimetry system for gas cluster ion beam" and a "Gas cluster ion beam smoother apparatus." The first patent describes a method and apparatus for gas cluster ion beam (GCIB) processing that utilizes X-Y scanning of the workpiece relative to the GCIB. A neutralizer is employed to reduce surface charging of the workpiece by the GCIB. Additionally, a single Faraday cup sensor is used to measure the GCIB current for dosimetry and scanning control, as well as to monitor and control the degree of surface charging that may be induced during processing. The second patent outlines an apparatus designed for smoothing the surface of a substrate. This apparatus includes an ionizer to form gas cluster particles, a power supply to accelerate these particles, and a triode/Einzel lens combination assembly to focus the accelerated gas cluster particles. It also features a permanent magnet beam filter and scan plates to irradiate the filtered particles onto a workpiece situated in a reduced pressure atmosphere chamber.
Career Highlights
Bruce K. Libby is currently associated with Epion Corporation, where he continues to develop and refine his innovative technologies. His work has significantly advanced the capabilities of gas cluster ion beam processing, making it more efficient and effective.
Collaborations
Throughout his career, Bruce has collaborated with notable colleagues, including Isao Yamada and James A. Greer. These collaborations have further enriched his work and contributed to the advancements in the field.
Conclusion
Bruce K. Libby is a prominent inventor whose contributions to gas cluster ion beam technology have made a lasting impact. His innovative patents and ongoing work at Epion Corporation highlight his dedication to advancing this specialized field.
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