Company Filing History:
Years Active: 2002-2004
Title: Richard P. Torti: Innovator in Gas Cluster Ion Beam Technology
Introduction
Richard P. Torti is a notable inventor based in Burlington, MA (US), recognized for his contributions to the field of gas cluster ion beam technology. With a total of 4 patents to his name, Torti has made significant advancements that enhance the precision and efficiency of ion beam processing systems.
Latest Patents
Torti's latest patents include innovative methods and apparatuses for measuring the distribution of cluster ion sizes in a gas cluster ion beam (GCIB). One of his key inventions focuses on gas cluster ion beam size diagnostics, which allows for the determination of mass distribution and mass flow of cluster ions in a GCIB processing system without the need to reject a portion of the beam through magnetic or electrostatic mass analysis. This invention utilizes time-of-flight measurement to estimate or monitor cluster ion size distribution either before or during the processing of a workpiece. The information gathered is displayed and integrated into the automated control of a GCIB processing system.
Another significant patent involves a detector apparatus for cluster ion beam diagnostics. This detector features a Faraday cup with a conductance path to a gas pressure detector, enabling it to acquire ion current, which measures the ion beam flux. Additionally, it captures mass flux through pressure measurement, responding to the mass of dissociated gas clusters. This data is combined with instantaneous ion current information to estimate the mean gas cluster ion size.
Career Highlights
Richard P. Torti is currently associated with Epion Corporation, where he continues to develop and refine technologies related to gas cluster ion beams. His work has positioned him as a key figure in advancing ion beam processing techniques.
Collaborations
Torti has collaborated with notable colleagues, including Matthew C. Gwinn and Jerald P. Dykstra, contributing to the innovative environment at Epion Corporation.
Conclusion
Richard P. Torti's work in gas cluster ion beam technology exemplifies the impact of innovation in the field of ion beam processing. His patents reflect a commitment to enhancing the capabilities of GCIB systems, making significant strides in the industry.