The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2003
Filed:
Dec. 01, 2000
Applicant:
Inventors:
Richard P. Torti, Burlington, MA (US);
Jerald P. Dykstra, Austin, TX (US);
Assignee:
Epion Corporation, Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 4/926 ; H01J 3/7317 ;
U.S. Cl.
CPC ...
H01J 4/926 ; H01J 3/7317 ;
Abstract
Incorporating the use of a permanent magnet within a GCIB apparatus to separate undesirable monomer ions from a gas cluster ion beam to facilitate improved processing of workpieces. In an alternate embodiment, the effect of the permanent magnet may be controlled by the use of an electrical coil. The above system eliminates problems related to power consumption and heat generation.