The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2014
Filed:
Sep. 29, 2004
Akinobu Sato, Soka, JP;
Akiko Suzuki, Akishima, JP;
Emmanuel Bourelle, Musashimurayama, JP;
Jiro Matsuo, Kyoto, JP;
Toshio Seki, Kyoto, JP;
Takaaki Aoki, Kyoto, JP;
Akinobu Sato, Soka, JP;
Akiko Suzuki, Akishima, JP;
Emmanuel Bourelle, Musashimurayama, JP;
Jiro Matsuo, Kyoto, JP;
Toshio Seki, Kyoto, JP;
Takaaki Aoki, Kyoto, JP;
Japan Aviation Electronics Industry Limited, Tokyo, JP;
Abstract
In a method of irradiating a gas cluster ion beam on a solid surface and smoothing the solid surface, the angle formed between the solid surface and the gas cluster ion beam is chosen to be between 1° and an angle less than 30°. In case the solid surface is relatively rough, the processing efficiency is raised by first irradiating a beam at an irradiation angle θ chosen to be something like 90° as a first step, and subsequently at an irradiation angle θ chosen to be 1° to less than 30° as a second step. Alternatively, the set of the aforementioned first step and second step is repeated several times.