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Hartmut Enkisch

USPTO Granted Patents = 26 (Patent Applications = 6)

EPO Patents = 7 (Patent Applications = 9)

Average Co-Inventor Count = 3.2

ph-index = 2

Forward Citations = 26(Granted Patents)

Company Filing History:

22 out of 1,409

Carl Zeiss Smt Gmbh

Carl-zeiss-smt Ag

Years Active: 2007-2025

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26 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 12406777 - Optical element for a EUV projection exposure system (2025-09-02),

2. 11073765 - Method for producing a reflective optical element and reflective optical element (2021-07-27),

3. 10916356 - Reflective optical element (2021-02-09),

4. 10809625 - Intensity adaptation filter for EUV microlithography, method for producing same, and illumination system having a corresponding filter (2020-10-20),

5. 10598921 - Mirror element, in particular for a microlithographic projection exposure apparatus (2020-03-24),

6. 10545323 - Projection optical unit for EUV projection lithography (2020-01-28),

7. 10520827 - Optical system, in particular for a microlithographic projection exposure apparatus (2019-12-31),

8. 10423073 - Method for producing a mirror element (2019-09-24),

9. 10331048 - Mirror, in particular for a microlithographic projection exposure apparatus (2019-06-25),

10. 10146136 - Reflecting coating with optimized thickness (2018-12-04),

11. 10061204 - Mirror, in particular for a microlithographic projection exposure apparatus (2018-08-28),

12. 9915873 - Reflective optical element, and optical system of a microlithographic projection exposure apparatus (2018-03-13),

13. 9778576 - Microlithography illumination system and microlithography illumination optical unit (2017-10-03),

14. 9720329 - Projection objective of a microlithographic projection exposure apparatus (2017-08-01),

15. 9606446 - Reflective optical element for EUV lithography and method of manufacturing a reflective optical element (2017-03-28),

Title: Hartmut Enkisch - Innovative Inventor from Aalen

Introduction: Hartmut Enkisch is a renowned inventor hailing from Aalen, Germany, known for his groundbreaking contributions to various technological fields.

Latest Patents: Hartmut Enkisch holds several patents in the areas of renewable energy, sustainable materials, and advanced manufacturing processes, showcasing his commitment to innovation.

Career Highlights: Throughout his career, Hartmut Enkisch has worked tirelessly to develop cutting-edge solutions that have revolutionized industries, earning him a reputation as a visionary inventor.

Collaborations: Hartmut Enkisch has collaborated with leading research institutions and companies worldwide, fostering a culture of innovation and driving progress in the field of technology.

Conclusion: Hartmut Enkisch's passion for innovation and his dedication to pushing the boundaries of what is possible make him a true pioneer in the world of inventions.

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