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Gloucester, MA, United States of America

Varian Semiconductor Equipment Associates, Inc.

USPTO Granted Patents = 916

EPO Patents = 19

Trademarks = 6

Forward Citations = 4,924

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517 inventors (with patents filed for the assignee):

Joseph C Olson (86 out of 130 patents)

Frank Sinclair (82 out of 136 patents)

Ludovic Godet (68 out of 244 patents)

4. Anthony Renau (61 out of 68 patents)

5. Bon-Woong Koo (60 out of 73 patents)

6. Morgan Evans (46 out of 83 patents)

7. Svetlana Radovanov (46 out of 54 patents)

8. Russell J Low (42 out of 42 patents)

9. John J Hautala (41 out of 99 patents)

10. Timothy J Miller (40 out of 48 patents)

11. Vikram Singh (36 out of 44 patents)

12. Peter F Kurunczi (35 out of 49 patents)

13. Craig Richard Chaney (35 out of 45 patents)

14. Julian G Blake (33 out of 59 patents)

15. Christopher R Hatem (32 out of 35 patents)

Core Competencies:

Chemical Deposition

Surface Engineering

Ion Implantation

Plasma Cleaning

Semiconductor Manufacturing

Nanoscale Patterning

Optical Elements

EUV Photoresist

Reactive Ion Etching

Fin Structures

Electrostatic Charge Control

Fault Current Limiter

916 patents: Sort by Forward Citations

1. 12104253 - Techniques for controlling precursors in chemical deposition processes (2024-10-01),

2. 11862433 - System and methods using an inline surface engineering source (2024-01-02),

3. 11718914 - Techniques for controlling precursors in chemical deposition processes (2023-08-08),

4. 11691184 - System and tool for cleaning a glass surface of an accelerator column (2023-07-04),

5. 11631588 - Method and apparatus for non line-of-sight doping (2023-04-18),

6. 11574800 - Extreme edge uniformity control (2023-02-07),

7. 11532483 - Spacer sculpting for forming semiconductor devices (2022-12-20),

8. 11495434 - In-situ plasma cleaning of process chamber components (2022-11-08),

9. 11488823 - Techniques to engineer nanoscale patterned features using ions (2022-11-01),

10. 11462546 - Dynamic random access device including two-dimensional array of fin structures (2022-10-04),

11. 11442207 - System and method for forming diffracted optical element having varied gratings (2022-09-13),

12. 11424112 - Transparent halo assembly for reduced particle generation (2022-08-23),

13. 11404278 - Optical component having variable depth gratings and method of formation (2022-08-02),

14. 11404254 - Insertable target holder for solid dopant materials (2022-08-02),

15. 11402649 - System and method for optimally forming gratings of diffracted optical elements (2022-08-02),

Varian Semiconductor Equipment Associates, Inc. is a leading global supplier of ion implantation equipment used in the fabrication of semiconductors. With over 40 years of experience, Varian Semiconductor has continuously innovated in ion implantation technology, enabling the production of high-performance chips used in various industries. Visit our website to learn more about our products, services, and commitment to advancing semiconductor manufacturing.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 30 2025

916 Patents

#1 in Gloucester, MA

#30 in Massachusetts

#550 in US

#1,080 in the World

Gloucester, MA, United States of America

Varian Semiconductor Equipment Associates, Inc.

Forward Citations = 4,924

517 inventors:

Joseph C Olson (86 out of 130 patents)

Frank Sinclair (82 out of 136 patents)

Ludovic Godet (68 out of 244 patents)

4. Anthony Renau (61 out of 68 patents)

5. Bon-Woong Koo (60 out of 73 patents)

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