Timothy J Miller

Title: Timothy J Miller: Innovating in Plasma Processing and Environmental Control

Introduction:

Meet Timothy J Miller, a prolific inventor hailing from Ipswich, Massachusetts (US). With an impressive track record of 45 patents, Miller has made significant contributions to the field of plasma processing apparatus and techniques. Additionally, he has pioneered methods for controlling fugitive emissions during the processing and passivation of implanted workpieces. Let's delve into his latest patents, career highlights, and collaborations in more detail.

Latest Patents:

One of Miller's latest patents is for a plasma processing apparatus and techniques. This invention consists of a main chamber that accommodates a substrate holder in its lower region and an RF applicator in the upper region. The RF applicator generates an upper plasma, while a central chamber structure shields a portion of the substrate region from this upper plasma. The apparatus incorporates a bias source to generate a glow discharge plasma in the central portion of the main chamber, enhancing the processing conditions for the substrate.

Another recent patent by Miller addresses the imperative issue of controlling phosphorus fugitive emissions during workpiece processing. This method involves passivating the implanted workpiece after processing and significantly reducing fugitive emissions. Miller suggests post-processing steps like sputtering or chemical etching to lower the concentration of toxic dopants such as phosphorus, arsine, or germane on the workpiece's surface. These steps are followed by a traditional passivation process.

Career Highlights:

Throughout his career, Timothy J Miller has worked with renowned companies such as Varian Semiconductor Equipment Associates, Inc. and Applied Materials, Inc. At Varian Semiconductor Equipment Associates, Inc., he contributed to the development of innovative technologies and solutions related to plasma processing apparatus. His expertise in this area led to several patents and technological advancements.

Later, Miller joined Applied Materials, Inc., where he continued his pioneering work in plasma processing. Applied Materials, Inc., a global leader in materials engineering solutions, provided Miller with an ideal platform to explore cutting-edge innovations and collaborate with industry experts.

Collaborations:

Collaboration is integral to the advancement of any field, and Timothy J Miller actively engaged with his peers to achieve groundbreaking results. Notably, he collaborated with Ludovic Godet and Vikram Singh on various projects. Their joint efforts contributed to the development of novel technologies, enabling advancements in plasma processing and the reduction of fugitive emissions during workpiece passivation.

Conclusion:

Timothy J Miller's remarkable contributions to the field of plasma processing and environmental control stand testament to his expertise and pioneering spirit. With 45 patents to his name, including his recent work on plasma processing apparatus and techniques, Miller has played a pivotal role in advancing the semiconductor industry. Through collaborations with esteemed colleagues like Ludovic Godet and Vikram Singh, Miller has consistently pushed the boundaries of innovation. We eagerly anticipate his future breakthroughs and the positive impact they will have on the field of plasma processing and related industries.