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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 11404278 B1

PDFFull Text
Date of Patent:
Aug. 02, 2022

Filed:

Sep. 22, 2020

Optical component having variable depth gratings and method of formation

Applicant:

Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);

Inventors:

John Hautala, Beverly, MA (US);

Morgan Evans, Manchester, MA (US);

Rutger Meyer Timmerman Thijssen, Sunnyvale, CA (US);

Joseph C. Olson, Beverly, MA (US);

Assignee:

Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);

Attorney:

KDB Firm PLLC

Primary Examiner:

Thomas A Hollweg

Assistant Examiner:

Mary A El-Shammaa

Int. Cl.
CPC ...
H01L 21/302 (2006.01); G02B 6/34 (2006.01); G02B 5/18 (2006.01); G02B 27/42 (2006.01); F21V 8/00 (2006.01); G02B 27/01 (2006.01); H01L 21/311 (2006.01); G02B 6/12 (2006.01);
U.S. Cl.
CPC ...
H01L 21/302 (2013.01); G02B 5/1842 (2013.01); G02B 5/1857 (2013.01); G02B 6/0015 (2013.01); G02B 6/0016 (2013.01); G02B 6/0018 (2013.01); G02B 6/34 (2013.01); G02B 27/0172 (2013.01); G02B 27/4272 (2013.01); H01L 21/311 (2013.01); G02B 2006/12107 (2013.01); G02B 2027/0109 (2013.01);
Abstract

An optical grating component may include a substrate, and an optical grating, the optical grating being disposed on the substrate. The optical grating may include a plurality of angled structures, disposed at a non-zero angle of inclination with respect to a perpendicular to a plane of the substrate, wherein the plurality of angled structures are arranged to define a variable depth along a first direction, the first direction being parallel to the plane of the substrate.

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Quick Actions:

Hautala, John. (2022). Optical component having variable depth gratings and method of formation (U.S. Patent No. 11404278). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/11404278

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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