Tokyo, Japan

Yukio Kembo

USPTO Granted Patents = 36 

Average Co-Inventor Count = 5.0

ph-index = 19

Forward Citations = 954(Granted Patents)


Location History:

  • Yokohama, JP (1980 - 2007)
  • Shakujii-machi, JP (2002 - 2008)
  • Tokyo, JP (2005 - 2013)
  • Ibaraki, JP (2014)

Company Filing History:


Years Active: 1980-2014

where 'Filed Patents' based on already Granted Patents

36 patents (USPTO):

Title: **Yukio Kembo: Innovator in Scanning Probe Microscopy**

Introduction

Yukio Kembo is a prominent inventor based in Tokyo, Japan, recognized for his significant contributions to the field of microscopy. With an extensive portfolio of 36 patents, he has pioneered innovative solutions for complex measurement challenges.

Latest Patents

One of his latest patents revolves around advancements in scanning probe microscopy. In this innovation, Kembo addresses the issue of measuring patterns with steep side walls. The probe's adhesion to the side wall, influenced by van der Waals forces, can lead to errors in the measured profile. To overcome this, Kembo devised a method to temporarily increase the contact force between the probe and the sample, enabling the probe to reach the side wall bottom effectively. Furthermore, by analyzing the torsion data of the cantilever alongside the shape data of the pattern, he proposes a technique to correct profile errors induced by probe adhesion, enhancing the accuracy of depth measurements in high-aspect ratio patterns.

Career Highlights

Throughout his career, Yukio Kembo has made remarkable strides in his field while working for esteemed companies such as Hitachi, Ltd. and Hitachi High-Technologies Corporation. His work at these institutions has been instrumental in advancing technological applications in microscopy.

Collaborations

Kembo has collaborated with notable professionals such as Minori Noguchi and Yoshimasa Ohshima, contributing to a dynamic exchange of ideas and innovations in the field, which has propelled further advancements in microscopy technologies.

Conclusion

Yukio Kembo's work exemplifies the spirit of innovation in the scientific community. Through his patents and collaborations, he continues to lead the way in developing cutting-edge technologies that tackle existing challenges in scanning probe microscopy, paving the way for future advancements in the field.

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