The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2009
Filed:
Oct. 18, 2005
Shigenobu Maruyama, Oiso, JP;
Mineo Nomoto, Yokohama, JP;
Toru Kurenuma, Tsuchiura, JP;
Yuichi Kunitomo, Tsuchiura, JP;
Yukio Kembo, Tokyo, JP;
Shigenobu Maruyama, Oiso, JP;
Mineo Nomoto, Yokohama, JP;
Toru Kurenuma, Tsuchiura, JP;
Yuichi Kunitomo, Tsuchiura, JP;
Yukio Kembo, Tokyo, JP;
Hitachi Kenki Fine Tech Co., Ltd., Tokyo, JP;
Abstract
A scanning probe microscope for measuring a surface profile of a sample by bringing a probe into close proximity to or contact with the surface of the sample and scanning the sample surface includes: a sample stage movable in at least one axis direction; the probe which is brought into close proximity to or contact with the surface of the sample mounted on the sample stage and scans the sample surface; a probe-driving unit for moving the probe three-dimensionally; a probe deflection detector for detecting a deflection of the probe; and an observation optical system which has an objective lens and observes the probe disposed on substantially the optical axis of the objective lens, and the sample. The probe-driving unit is disposed with three sets of paired drive sources arranged essentially with symmetry with respect to the optical axis of the objective lens.