The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2008
Filed:
Mar. 05, 2007
Minori Noguchi, Yokohama, JP;
Yoshimasa Ohshima, Yokohama, JP;
Hidetoshi Nishiyama, Fujisawa, JP;
Shunichi Matsumoto, Yokohama, JP;
Yukio Kembo, Shakujii-machi, JP;
Ryouji Matsunaga, Chigasaki, JP;
Keiji Sakai, Tokyo, JP;
Takanori Ninomiya, Hiratsuka, JP;
Tetsuya Watanabe, Honjo, JP;
Hisato Nakamura, Kamisato-machi, JP;
Takahiro Jingu, Takasaki, JP;
Yoshio Morishige, Honjo, JP;
Shuichi Chikamatsu, Kounosu, JP;
Minori Noguchi, Yokohama, JP;
Yoshimasa Ohshima, Yokohama, JP;
Hidetoshi Nishiyama, Fujisawa, JP;
Shunichi Matsumoto, Yokohama, JP;
Yukio Kembo, Shakujii-machi, JP;
Ryouji Matsunaga, Chigasaki, JP;
Keiji Sakai, Tokyo, JP;
Takanori Ninomiya, Hiratsuka, JP;
Tetsuya Watanabe, Honjo, JP;
Hisato Nakamura, Kamisato-machi, JP;
Takahiro Jingu, Takasaki, JP;
Yoshio Morishige, Honjo, JP;
Shuichi Chikamatsu, Kounosu, JP;
Hitachi, Ltd., Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A defect inspection apparatus includes an illumination optical unit for obliquely illuminating an object with a slit-like shaped laser, a first detection optical unit for detecting a first image formed by light reflected from the object by the illumination of the slit-like shaped laser and reflected in a first direction substantially normal to a surface of the object, a second detection optical unit for detecting a second image formed by light reflected from the object by the illumination of the slit-like shaped laser and reflected in a second direction inclined to the normal direction to the surface of the object, an image signal processing unit which processes a signal outputted from the first detection optical unit and a signal outputted from the second detection optical unit, and an output unit which outputs information processed by the image signal processing unit.